{"id":751,"date":"2026-03-17T15:27:32","date_gmt":"2026-03-17T07:27:32","guid":{"rendered":"https:\/\/lighte.gongjionline.cn\/cus_case\/jing-yuan-biao-mian-ping-zheng-du-gao-jing-du-jian\/"},"modified":"2026-08-25T17:32:47","modified_gmt":"2026-08-25T09:32:47","slug":"wafer-flatness-measurement","status":"publish","type":"case","link":"https:\/\/www.lightegroup.com\/fr\/case\/wafer-flatness-measurement\/","title":{"rendered":"Inspection haute pr\u00e9cision de la plan\u00e9it\u00e9 de la surface des plaquettes"},"content":{"rendered":"<p>La plan\u00e9it\u00e9 de la surface des plaquettes influence directement la pr\u00e9cision de la mise au point lors de la photolithographie ainsi que la coh\u00e9rence des dispositifs, et m\u00eame de faibles variations topographiques peuvent entra\u00eener des d\u00e9fauts de processus. LightE utilise une solution de mesure sans contact haute r\u00e9solution pour scanner pr\u00e9cis\u00e9ment la surface des plaquettes, assurant ainsi une d\u00e9tection fiable de la plan\u00e9it\u00e9 et de la topographie locale, et fournissant un support de donn\u00e9es solide pour l\u2019optimisation des proc\u00e9d\u00e9s.<\/p>","protected":false},"featured_media":3755,"template":"","meta":{"_acf_changed":false,"_seopress_robots_primary_cat":"","_seopress_titles_title":"High-precision inspection of wafer surface flatness - LightE Application","_seopress_titles_desc":"Wafer surface flatness directly affects photolithography focus accuracy and device consistency, and small topography changes may also cause process defect...","_seopress_robots_index":"","_seopress_analysis_target_kw":""},"class_list":["post-751","case","type-case","status-publish","has-post-thumbnail","hentry"],"acf":[],"_links":{"self":[{"href":"https:\/\/www.lightegroup.com\/fr\/wp-json\/wp\/v2\/case\/751","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.lightegroup.com\/fr\/wp-json\/wp\/v2\/case"}],"about":[{"href":"https:\/\/www.lightegroup.com\/fr\/wp-json\/wp\/v2\/types\/case"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.lightegroup.com\/fr\/wp-json\/wp\/v2\/media\/3755"}],"wp:attachment":[{"href":"https:\/\/www.lightegroup.com\/fr\/wp-json\/wp\/v2\/media?parent=751"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}