{"id":751,"date":"2026-03-17T15:27:32","date_gmt":"2026-03-17T07:27:32","guid":{"rendered":"https:\/\/lighte.gongjionline.cn\/cus_case\/jing-yuan-biao-mian-ping-zheng-du-gao-jing-du-jian\/"},"modified":"2026-07-14T17:04:00","modified_gmt":"2026-07-14T09:04:00","slug":"wafer-flatness-measurement","status":"publish","type":"case","link":"https:\/\/www.lightegroup.com\/es\/case\/wafer-flatness-measurement\/","title":{"rendered":"Inspecci\u00f3n de alta precisi\u00f3n de la planicidad superficial de la oblea"},"content":{"rendered":"<p>La planicidad de la superficie de la oblea influye directamente en la precisi\u00f3n del enfoque de la fotolitograf\u00eda y en la consistencia del dispositivo, y hasta peque\u00f1os cambios topogr\u00e1ficos pueden provocar defectos en el proceso. LightE utiliza una soluci\u00f3n de medici\u00f3n sin contacto de alta resoluci\u00f3n para escanear con precisi\u00f3n la superficie de la oblea, logrando una detecci\u00f3n estable de la planicidad y de la topograf\u00eda local, proporcionando as\u00ed un soporte de datos confiable para la optimizaci\u00f3n del proceso.<\/p>","protected":false},"featured_media":1315,"template":"","meta":{"_acf_changed":false,"_seopress_robots_primary_cat":"","_seopress_titles_title":"High-precision inspection of wafer surface flatness - LightE Application","_seopress_titles_desc":"Wafer surface flatness directly affects photolithography focus accuracy and device consistency, and small topography changes may also cause process defect...","_seopress_robots_index":"","_seopress_analysis_target_kw":""},"class_list":["post-751","case","type-case","status-publish","has-post-thumbnail","hentry"],"acf":[],"_links":{"self":[{"href":"https:\/\/www.lightegroup.com\/es\/wp-json\/wp\/v2\/case\/751","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.lightegroup.com\/es\/wp-json\/wp\/v2\/case"}],"about":[{"href":"https:\/\/www.lightegroup.com\/es\/wp-json\/wp\/v2\/types\/case"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.lightegroup.com\/es\/wp-json\/wp\/v2\/media\/1315"}],"wp:attachment":[{"href":"https:\/\/www.lightegroup.com\/es\/wp-json\/wp\/v2\/media?parent=751"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}