{"id":757,"date":"2026-03-17T15:29:48","date_gmt":"2026-03-17T07:29:48","guid":{"rendered":"https:\/\/lighte.gongjionline.cn\/cus_case\/jing-yuan-biao-mian-wei-jie-gou-gao-du-ce-liang\/"},"modified":"2026-07-14T17:04:10","modified_gmt":"2026-07-14T09:04:10","slug":"microstructure-height-measurement","status":"publish","type":"case","link":"https:\/\/www.lightegroup.com\/de\/case\/microstructure-height-measurement\/","title":{"rendered":"H\u00f6henmessung der Mikrostruktur auf der Waferoberfl\u00e4che"},"content":{"rendered":"<p>In fortschrittlichen Fertigungsprozessen weist die Waferoberfl\u00e4che zahlreiche Mikrostrukturen auf, deren hohe Pr\u00e4zision das Bauelementverhalten ma\u00dfgeblich beeinflusst. LightE nutzt eine hochaufl\u00f6sende ber\u00fchrungslose Messl\u00f6sung, um die H\u00f6he dieser Mikrostrukturen stabil zu erfassen und Nanometer\u2011Genauigkeitsanforderungen zu erf\u00fcllen.<\/p>","protected":false},"featured_media":1249,"template":"","meta":{"_acf_changed":false,"_seopress_robots_primary_cat":"","_seopress_titles_title":"Wafer surface microstructure height measurement - LightE Application","_seopress_titles_desc":"In advanced processes, the wafer surface contains a large number of microstructures, and their high precision has a significant impact on device performan...","_seopress_robots_index":"","_seopress_analysis_target_kw":""},"class_list":["post-757","case","type-case","status-publish","has-post-thumbnail","hentry"],"acf":[],"_links":{"self":[{"href":"https:\/\/www.lightegroup.com\/de\/wp-json\/wp\/v2\/case\/757","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.lightegroup.com\/de\/wp-json\/wp\/v2\/case"}],"about":[{"href":"https:\/\/www.lightegroup.com\/de\/wp-json\/wp\/v2\/types\/case"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.lightegroup.com\/de\/wp-json\/wp\/v2\/media\/1249"}],"wp:attachment":[{"href":"https:\/\/www.lightegroup.com\/de\/wp-json\/wp\/v2\/media?parent=757"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}