{"id":751,"date":"2026-03-17T15:27:32","date_gmt":"2026-03-17T07:27:32","guid":{"rendered":"https:\/\/lighte.gongjionline.cn\/cus_case\/jing-yuan-biao-mian-ping-zheng-du-gao-jing-du-jian\/"},"modified":"2026-07-14T17:04:00","modified_gmt":"2026-07-14T09:04:00","slug":"wafer-flatness-measurement","status":"publish","type":"case","link":"https:\/\/www.lightegroup.com\/de\/case\/wafer-flatness-measurement\/","title":{"rendered":"Hochpr\u00e4zise Pr\u00fcfung der Oberfl\u00e4chenebenheit von Wafern"},"content":{"rendered":"<p>Die Ebenheit der Waferoberfl\u00e4che beeinflusst unmittelbar die Fokusgenauigkeit der Photolithografie sowie die Konsistenz der Bauelemente; selbst geringf\u00fcgige topografische Ver\u00e4nderungen k\u00f6nnen Prozessfehler verursachen. LightE setzt eine ber\u00fchrungslose hochaufl\u00f6sende Messl\u00f6sung ein, um die Waferoberfl\u00e4che pr\u00e4zise zu scannen und sowohl die Ebenheit als auch lokale Topografien stabil zu erfassen, wodurch zuverl\u00e4ssige Daten f\u00fcr die Prozessoptimierung bereitgestellt werden.<\/p>","protected":false},"featured_media":1315,"template":"","meta":{"_acf_changed":false,"_seopress_robots_primary_cat":"","_seopress_titles_title":"High-precision inspection of wafer surface flatness - LightE Application","_seopress_titles_desc":"Wafer surface flatness directly affects photolithography focus accuracy and device consistency, and small topography changes may also cause process defect...","_seopress_robots_index":"","_seopress_analysis_target_kw":""},"class_list":["post-751","case","type-case","status-publish","has-post-thumbnail","hentry"],"acf":[],"_links":{"self":[{"href":"https:\/\/www.lightegroup.com\/de\/wp-json\/wp\/v2\/case\/751","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.lightegroup.com\/de\/wp-json\/wp\/v2\/case"}],"about":[{"href":"https:\/\/www.lightegroup.com\/de\/wp-json\/wp\/v2\/types\/case"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.lightegroup.com\/de\/wp-json\/wp\/v2\/media\/1315"}],"wp:attachment":[{"href":"https:\/\/www.lightegroup.com\/de\/wp-json\/wp\/v2\/media?parent=751"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}