{"id":750,"date":"2026-03-17T15:27:32","date_gmt":"2026-03-17T07:27:32","guid":{"rendered":"https:\/\/lighte.gongjionline.cn\/cus_case\/jing-yuan-qiao-qu-du-zai-xian-jian-ce\/"},"modified":"2026-07-14T17:03:56","modified_gmt":"2026-07-14T09:03:56","slug":"wafer-warp-bow-measurement","status":"publish","type":"case","link":"https:\/\/www.lightegroup.com\/de\/case\/wafer-warp-bow-measurement\/","title":{"rendered":"Online-Erkennung von Wafer-Warping"},"content":{"rendered":"<p>Wafer neigen w\u00e4hrend des Herstellungsprozesses aufgrund thermischer Spannungen und unterschiedlicher Materialien zur Verformung, was sich auf nachfolgende Handhabungs-, Belichtungs- und Laminierprozesse auswirkt. Mit herk\u00f6mmlichen Stichprobenpr\u00fcfmethoden ist es schwierig, Abweichungen rechtzeitig zu erkennen. LightE setzt eine hochpr\u00e4zise L\u00f6sung zur Wegmessung ein, um das Oberfl\u00e4chenprofil der Wafer ber\u00fchrungslos zu scannen, schnell Verformungsdaten zu erfassen und Kunden dabei zu unterst\u00fctzen, Prozessparameter im Laufe des Prozesses zeitnah anzupassen.<\/p>","protected":false},"featured_media":1314,"template":"","meta":{"_acf_changed":false,"_seopress_robots_primary_cat":"","_seopress_titles_title":"Wafer warpage online detection - LightE Application","_seopress_titles_desc":"Wafers are prone to warping due to thermal stress and material differences during the manufacturing process, which affects subsequent handling, exposure,...","_seopress_robots_index":"","_seopress_analysis_target_kw":""},"class_list":["post-750","case","type-case","status-publish","has-post-thumbnail","hentry"],"acf":[],"_links":{"self":[{"href":"https:\/\/www.lightegroup.com\/de\/wp-json\/wp\/v2\/case\/750","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.lightegroup.com\/de\/wp-json\/wp\/v2\/case"}],"about":[{"href":"https:\/\/www.lightegroup.com\/de\/wp-json\/wp\/v2\/types\/case"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.lightegroup.com\/de\/wp-json\/wp\/v2\/media\/1314"}],"wp:attachment":[{"href":"https:\/\/www.lightegroup.com\/de\/wp-json\/wp\/v2\/media?parent=750"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}